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A1 _ Analog MFC

Full Scale Range (N2 eqv) : 10 sccm ~ 30 slm

Power Supply : ± 15 VDC Or +12 ~ 32 VDC

Signal Type : 0 ~ 5 VDC Or 4 ~ 20mA

Seal Type : Elastomer (VITON)

Strong stability and High cost performance 

Performance Parameters

Model.

A1

Full Scale Range

Control Valve

Fitting

Seal

Response Time

Accuracy

Lineality

Operating Differential Pressure

Leak Integrity

Control Range

Max. Operating Pressure

Proof Pressure

Input Signal

Power Supply

Output Signal

Power Consumption

Operation Tempetature

Material

Surface Finish

Weight

10 sccm - 30 slm (N2 Eqv.)

Normally Closed / Normally Open

1/4" M.VCR or 1/4" Swagelok Compatible

VITON

​≤ 1.5  sec

​≤ ± 1.0 % of Full Scale.

​≤ ± 0.5 % of Full Scale.

​≤ ± 0.2 % of Full Scale.

Repeatability

0.5 - 3.0 barg

Max 1 x 10-9 Pa.m3/sec (He)

​±15 VDC

5 barg

10 barg

DC 0 - 5 VDC or 4 - 20mA

+15 VDC ±2% 25mA

-15 VDC ±2% 180mA

+12 VDC ~ +32 VDC

+12VDC 500mA ~ +32VDC 180mA

DC 0 - 5 VDC or 4 - 20mA

​±15 VDC

+12 VDC ~ +32 VDC

3.1 W

6 W

5 - 45 ℃

SUS316L , VITON , PTFE , Electromagnetic Stainess steel

​≤ 5RA

appr. 0.8kg

Electrical Connections

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D-SUB9PIN _ ± 15 VDC

D-SUB9PIN _ +12 - 32VDC

Electrical Connections

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