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A2 _ Analog MFC

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Full Scale Range (N2 eqv) : 2 sccm ~ 50 slm

Power Supply : ± 15 VDC Or +12 ~ 32 VDC

Signal Type : 0 ~ 5 VDC Or 4 ~ 20mA

Seal Type : Elastomer (VITON) or Metal (SUS316)

High performance products with excellent flow control

accuracy and stability, expecially in small flow range.

Performance Parameters

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Electrical Connections

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D-SUB9PIN _ ± 15 VDC

D-SUB9PIN _ +12 - 32VDC

Electrical Connections

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